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ASML handlers

1989-present: Handlers
Customer: ASML

The wafer handler and reticle handler modules for the ASML twinscan waferstepper, are but two examples of the many developments that CCM and ASML have accomplished.

Wafers and reticles are thermally conditioned, aligned and highly accurately positioned on the wafer chuck or reticle chuck via the handler.
Both handlers are now in series production.

Keywords: contamination, robots, precision positioning, vision, clean room, handling.